I finally managed the update as well. The NAC (Wave3) in my Toyota Proace was updated from 31.09.46.62 to 42.03.33.42.
One thing may be worth to note: the new .tar now contains PaxHeaders in every subfolder. Those are needed for the update. If you have an older version of 7-zip it could happen, that the extraction does not work correctly. The Header-Files are named the same and collide while extracting. 7-zip can handle PaxHeaders since version 21.07, so update if needed.